On-chip pseudorandom MEMS testing

Journal of Electronic Testing: Theory and Applications (JETTA)

Volumn 21, Issue 3, 2005, Pages 233-241

  Rufer, Libor ^a   Mir, Salvador ^a   Simeu, Emmanuel ^a   Domingues, Christian ^a  

^a TIMA LABORATORY   (France)

Author keywords

BIST; Impulse response; MEMS testing; Pseudorandom sequences

Indexed keywords

ALGORITHMS; BUILT-IN SELF TEST; COMPUTER SIMULATION; IMPULSE RESPONSE; INFRARED RADIATION; SENSORS; TRANSDUCERS;

MAXIMUM LENGTH SEQUENCES (MLS); MEMS TESTING; MICRO ELECTRO MECHANICAL SYSTEMS (MEMS); PSEUDORANDOM SEQUENCES;

MICROELECTROMECHANICAL DEVICES;

EID: 17444370944     PISSN: 09238174     EISSN: None     Source Type: Journal    
DOI: 10.1007/s10836-005-6353-9     Document Type: Article

References (13)

1. M. Brunbjerg Olesen, J. Bay, and J. Branebjerg, "Functional Testing and Calibration of Microsystems at Wafer Level," Micro Structure Workshop, Balsta, Sweden, March 2002, p. B 13.1.
2. A. Chandrakasan, R. Amirtharajah, S. Cho, J. Goodman, G. Konduri, J. Kulik, W. Rabiner, and A. Wang, "Design Considerations for Distributed Microsensor Systems," in Proc. IEEE Custom Integrated Circuits Conference, Piscataway, NJ, USA, 1999, pp. 279-286.
3. B. Charlot, S. Mir, F. Parrain, and B. Courtois, "Generation of Electrically Induced Stimuli for MEMS Self-Test," Journal of Electronic Testing: Theory and Applications, vol. 17, No. 6, pp. 459-470, 2001.
4. N. Deb and R.D. Blanton, "Built-In-Self-Test of CMOS-MEMS Accelerometers," in Proc. of the International Test Conference, Baltimore, MD, USA, Oct. 2002, pp. 1075-1084.
5. A. Dhayni, S. Mir, and L. Rufer, "MEMS Built-In-Self-Test Using MLS," in IEEE European Test Symposium, Ajaccio, Corsica, France, May 2004, pp. 66-71.
6. LABVIEW Version 7, National Instruments, 2004.
7. MATLAB Version 7 (R14), The Mathworks Inc., 2004.
8. P.M. Osterberg and S.D. Senturia, "M-test: A Test Chip for MEMS Material Property Measurement Using Electrostatically Actuated Test Structures," J. of Microelectromechanical Systems, vol. 6, No. 2, pp. 107-118, 1997.
9. C.Y. Pan and K.T. Cheng, "Pseudorandom Testing for Mixed-Signals Circuits," IEEE Trans. on Computer-Aided Design of Integrated Circuits and Systems, vol. 16, no. 10, pp. 1173-1185, 1997.
10. R. Puers, D. De Bruyker, and A. Cozma, "A Novel Combined Redundant Pressure Sensor with Self-Test Function," Sensors and Actuators A, vol. 60, pp. 68-71, 1997.
11. L. Rufer, "La modélisation des microsystèmes électromécaniques," Chapter in Conception des microsystèmes sur silicium, Edited by S. Mir Paris, (Ed.) Hermès, Traité EGEM, 2002.
12. L. Rufer, C. Domingues, and S. Mir, "Behavioural Modelling and Simulation of a MEMS-Based Ultrasonic Pulse-Echo System," in Proc. of the Design, Test, Integration and Packaging of MEMS/MOEMS, Cannes, France, May 2002, pp. 171-182.
13. L. Zimmermann, J. Ph. Ebersohl, F. Le. Hung, J.P. Berry, F. Baillieu, P. Rey, B. Diem, S. Renard, and P. Caillat, "Airbag Application: A Microsystem Including a Silicon Capacitive Accelerometer, CMOS Switched Capacitor Electronics and True Self-Test Capability," Sensors and Actuators A, vol. 46-47, pp. 190-195, 1995.