Generation of electrically induced stimuli for MEMS self-test

Journal of Electronic Testing: Theory and Applications (JETTA)

Volumn 17, Issue 6, 2001, Pages 459-470

  Charlot, Benoît ^a   Mir, Salvador ^a   Parrain, Fabien ^a   Courtois, Bernard ^a  

^a TIMA LABORATORY   (France)

Author keywords

BIST; MEMS failure mechanisms; MEMS test case studies; Self test

Indexed keywords

CAPACITANCE; CMOS INTEGRATED CIRCUITS; ELECTROSTATICS; MICROELECTROMECHANICAL DEVICES; SEEBECK EFFECT; SEMICONDUCTOR DEVICE MODELS; SPURIOUS SIGNAL NOISE; TRANSDUCERS;

ELECTROSTATIC CAPACITANCE; MICROELECTROMECHANICAL SYSTEMS; PIEZORESISTIVITY EFFECT;

BUILT-IN SELF TEST;

EID: 0035679438     PISSN: 09238174     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1012860420235     Document Type: Article

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