A novel combined redundant pressure sensor with self-test function

Sensors and Actuators, A: Physical

Volumn 60, Issue 1-3, 1997, Pages 68-71

  Puers, Robert ^a   De Bruyker, Dirk ^a   Cozma, Adriana ^a  

^a UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

Actuators; Biomedical applications; Pressure sensors

Indexed keywords

ACTUATORS; BRIDGE CIRCUITS; CAPACITORS; FABRICATION; PRESSURE;

PIEZORESISTOR; PRESSURE SENSORS; REDUNDANT MEASUREMENT; SELF TEST FUNCTION; THERMOPNEUMATIC ACTUATOR; WHEATSTONE BRIDGE;

SILICON SENSORS;

EID: 0031141299     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(96)01436-7     Document Type: Article

References (4)

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2. E. Peeters, Process development for 3D silicon microstructures, with application to mechanical sensor devices, Ph.D. Thesis, K.U. Leuven, 1994.
3. F. Van De Pol, D. Wonnink, M. Elwenspoek and J. Fluitman, A thermopneumatic actuation principle for a microminiature pump and other micromechanical devices, Sensors and Actuators, 20 (1989) 139-143.
4. M.J. Zdeblick et al., Thermopneumatically actuated microvalves and integrated electro-fluidic circuits, Proc. Actuator '94 Conf., Bremen, Germany, 1994.