SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Microelectronic Engineering

Volumn 61-62, Issue , 2002, Pages 933-945

III-V Semiconductor based MOEMS devices for optical telecommunications

(3) Garrigues, Michel a Leclercq, J L a Viktorovitch, P a

a ECOLE CENTRALE DE LYON (France)

Author keywords

III V Semiconductors; Micro opto electro mechanical systems (MOEMS); Telecommunications; Tunable devices

Indexed keywords

HETEROJUNCTIONS; LIGHT INTERFERENCE; OPTICAL COMMUNICATION; OPTICAL SHUTTERS; PHOTODETECTORS; ROTATING MACHINERY; SEMICONDUCTOR MATERIALS;

MICRO-OPTO-ELECTRO-MECHANICAL SYSTEM (MOMEMS) DEVICES;

MICROOPTICS;

EID: 17344383267 PISSN: 01679317 EISSN: None Source Type: Journal
DOI: 10.1016/S0167-9317(02)00545-2 Document Type: Conference Paper

Times cited : (19)

References (23)

1
- 0030156449
- Fabrication of InP-based freestanding microstructures by selective surface micromachining
- (1996) J. Micromechanics Microeng. , vol.6 , pp. 261
- Seassal, C.¹ Leclercq, J.L.² Viktorovitch, P.³

2
- 0029375715
- Tunable micromachined vertical cavity surface emitting laser
- (1995) Electron. Lett. , vol.31 , pp. 1671
- Wu, M.S.¹ Vail, E.C.² Li, G.S.³ Yuen, W.⁴ Chang-Hasnain, C.J.⁵

3
- 0029753966
- Widely and continuously tunable micromachined resonant cavity detector with wavelength tracking
- (1996) IEEE Photonics Technol. Lett. , vol.8 , pp. 98
- Wu, M.S.¹ Vail, E.C.² Li, G.S.³ Yuen, W.⁴ Chang-Hasnain, C.J.⁵

4
- 0030086347
- Continuously tunable micromachined vertical cavity emitting laser with 18-nm wavelength range
- (1996) Electron. Lett. , vol.32 , pp. 330
- Larson, M.C.¹ Massengale, A.R.² Harris, J.S.³

5
- 0031164575
- Wide and continuously tunable (30 nm) detector with uniform characteristics over tuning range
- (1997) Electron. Lett. , vol.33 , pp. 1122-1124
- Li, M.Y.¹ Yuen, W.² Chang-Hasnain, C.J.³

6
- 0031220963
- x/AlGaAs DBR
- (1997) Electron. Lett. , vol.33 , pp. 1702-1704
- Wu, M.S.¹ Li, G.S.² Yuen, W.³ Chang-Hasnain, C.J.⁴

7
- 0032023758
- x deformable mirrors
- (1998) IEEE Photonics Technol. Lett. , vol.10 , pp. 394
- Tayebati, P.¹ Wang, P.D.² Vakshoori, D.³ Sacks, R.N.⁴

8
- 0032295028
- Half-symmetric cavity tunable microelectromechanical VCSEL with single spatial mode
- (1998) IEEE Photonics Technol. Lett. , vol.10 , pp. 1679
- Tayebati, P.¹ Wang, P.² Vakhshoori, D.³ Lu, C.-C.⁴ Azimi, M.⁵ Sacks, R.N.⁶

9
- 0009437528
- U.S. Patent No. 5739945, 14 April
- (1998) Electrically tunable optical filter utilizing a deformable multi-layer mirror
- Tayebati, P.¹

10
- 0004320288
- Partners: Ecole Centrale de Lyon, France; INSA de Lyon, France; Thomson/CSF-LCR, Orsay, France; Technical University of Darmstadt, Germany; KTH, Stockholm, Sweden; Uppsala University, Sweden; Ericsson, Stockholm, Sweden
- InP-based micro-mechanical tunable and selective photodetector for wavelength division multiplexing systems

11
- 0004311368
- Partners: Technical University of Darmstadt, Germany; Ecole Centrale de Lyon, France; INSA de Lyon, France; THALES/LCR, Orsay, France; Opto+, Alcatel, Marcoussis, France; France Telecom, Bagneux, France; KTH, Stockholm, Sweden
- Micromechanical widely tunable VCSEL for WDM telecommunication systems

12
- 0031168895
- Long-wavelength resonant vertical-cavity LED/photodetector with a 75-nm tuning range
- (1997) IEEE Photonics Technol. Lett. , vol.9 , pp. 725
- Christenson, G.L.¹ Tran, A.T.T.D.² Zhu, Z.H.³ Lo, Y.H.⁴ Hong, M.⁵ Mannaerts, J.P.⁶ Bhat, R.⁷

13
- 0033658306
- C-band tuneable 6-mW vertical cavity surface emitting lasers
- Paper PD13, postconference edition
- (2000) OFC 2000 Tech. Dig.
- Vakhshoori, D.¹ Zhou, J.-H.² Jiang, M.³ Azimi, M.⁴ McCallion, K.⁵ Lu, C.-C.⁶ Knopp, K.J.⁷ Cai, J.⁸ Wang, P.D.⁹ Tayebati, P.¹⁰ Zhu, H.¹¹ Chen, P.¹²

14
- 0002244694
- Tunable VCSELs: Enabling wavelength-on-demand in metro networks
- (2001) Comp. Semiconductors , vol.7 , Issue.5 , pp. 49
- Chang-Hasnain, C.¹

15
- 0033079507
- Two-chip InGaAs-InP Fabry-Pérot PIN receiver for WDM systems
- (1999) IEEE Photonics Technol. Lett. , vol.11 , Issue.2 , pp. 260-262
- Peerlings, J.¹ Riemenschneider, R.² Naveen Kumar, V.³ Strassner, M.⁴ Pfeiffer, J.⁵ Scheuer, V.⁶ Daleiden, J.⁷ Mutamba, K.⁸ Herbst, S.⁹ Hartnagel, H.L.¹⁰ Meissner, P.¹¹

16
- 0030188863
- 1.26 μm vertical cavity laser with two InP/air-gap reflectors
- (1996) Electron. Lett. , vol.32 , Issue.15 , pp. 1369-1370
- Streubel, K.¹

17
- 4243646702
- French Patent No. 0002787, March
- (2000) Dispositif optoélectronique semiconducteur à fonction de transfert modulable électriquement
- Viktorovitch, P.¹ Leclercq, J.L.² Seassal, C.³ Spisser, A.⁴ Garrigues, M.⁵

18
- 85088371604
- Design and fabrication of optical microcavities using III-V semiconductor-based MOEMS
- Invited conference, MOEMS and Miniaturized Systems, SPIE Microfabrication Symposium 2000, Santa Clara (September 18-21, 2000)
- (2000) Proc. SPIE , vol.4178 , Issue.30
- Viktorovitch, P.¹ Leclercq, J.L.² Goutain, E.³ Rondi, D.⁴

19
- 0001867861
- Supercritical carbon dioxide drying of microstructures
- ISBN 4-9900247-2-9, Yokohama, Japan (June 7-10)
- (1993) 7th Int. Conf. Solid-State Sensors and Actuators, Dig. of Tech. Papers (Transducers '93)
- Mulhern, G.T.¹ Soane, D.S.² Howe, R.T.³

20
- 0032164568
- Highly selective and widely tunable 1.55-μm InP/air-gap micromachined Fabry-Perot filter for optical communications
- (1998) IEEE Photonics Technol. Lett. , vol.10 , pp. 1259
- Spisser, A.¹ Ledantec, R.² Seassal, C.³ Leclercq, J.L.⁴ Benyattou, T.⁵ Rondi, D.⁶ Blondeau, R.⁷ Guillot, G.⁸ Viktorovitch, P.⁹

21
- 0002131057
- MOEMS applications for telecommunications
- Invited conference, Mainz, Germany 30 August-1 September, Institute für Mikrotechnik Mainz, Mainz, Germany
- (1999) MOEMS'99 , pp. 35-38
- Viktorovitch, P.¹ Leclercq, J.L.² Spisser, A.³ Daleiden, J.⁴ Chitica, N.⁵ Strassner, M.⁶ Rondi, D.⁷ Goutain, E.⁸ Peerlings, J.⁹ Pfeiffer, J.¹⁰ Riemenschneider, R.¹¹ Hjort, K.¹² Greek, S.¹³ Benyattou, T.¹⁴ Ledantec, R.¹⁵

22
- 4244216534
- Patent FR 2811139, jan.
- (2002) Dispositif optoélectronique à filtrage de longueur d'onde intégré
- Viktorovitch, P.¹ Garrigues, M.² Leclercq, J.L.³

23
- 0032684040
- 1-mW CW-RT monolithic VCSEL at 1.55 μm
- (1999) IEEE Photonics Technol. Lett. , vol.11 , pp. 629
- Boucart, J.¹ Stark, C.² Gaborti, F.³ Plais, A.⁴ Bouché, N.⁵ Derouin, E.⁶ Goldstein, L.⁷ Fortin, C.⁸ Carpentier, D.⁹ Salet, P.¹⁰ Brillouet, F.¹¹ Jacquet, J.¹²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.