Technique for characterization of thin film porosity

Thin Solid Films

Volumn 332, Issue 1-2, 1998, Pages 257-261

  Taylor, D J ^a   Fleig, P F ^a   Hietala, S L ^b  

^a TPL Incorporated   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Characterization; Surface acoustic wave; Thin film porosity

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ELLIPSOMETRY; GAS ADSORPTION; OPTICAL CORRELATION; PORE SIZE; POROSITY; QUARTZ; REFRACTIVE INDEX; SOL-GELS; SURFACE TOPOGRAPHY; THIN FILMS;

QUARTZ CRYSTAL MICROBALANCES;

OPTICAL FILMS;

EID: 0032476317     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)01264-4     Document Type: Article

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