In situ ellipsometry for control of Hg1-xCdxTe nanolayer structures and inhomogeneous layers during MBE growth

Thin Solid Films

Volumn 455-456, Issue , 2004, Pages 688-694

  Shvets, V A ^a   Rykhlitski, S V ^a   Spesivtsev, E V ^a   Aulchenko, N A ^a   Mikhailov, N N ^a   Dvoretsky, S A ^a   Sidorov, Yu G ^a   Smirnov, R N ^a  

^a INSTITUTE OF SEMICONDUCTOR PHYSICS   (Russian Federation)

Author keywords

Ellipsometric control; In situ; Inhomogeneous layers; MBE; MCT

Indexed keywords

COMPOSITION; DIFFUSION; ELLIPSOMETRY; MOLECULAR BEAM EPITAXY; REAL TIME SYSTEMS; SYNTHESIS (CHEMICAL);

ELLIPSOMETRIC CONTROL; IN SITU; INHOMOGENEOUS LAYERS; INTERDIFFUSION; MCT;

MERCURY COMPOUNDS;

EID: 17144448553     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2003.11.239     Document Type: Conference Paper

References (13)

1. Zhang X.F., Becker C.R., Zhang H., He L., Landwehr G. Semicond. Sci. Technol. 9:1994;2217.
2. Kim Y., Ourmazd A., Bode M., Feldman R.N. Phys. Rev. Lett. 63:1989;636.
3. Demay Y., Gailliard J.P., Medina P. J. Cryst. Growth. 81:1987;97.
4. Johs B., Herzinger C.M., Dinan J.H., Cornfeld A., Benson J.D. Thin Solid Films. 313-314:1998;137.
5. Hartley R.H., Folcard M.A., Carr D., Orders P.J., Rees D., Varga I.K., Kumar V., Shen G., Stelle T.A., Buskes H., Lee J.B. J. Cryst. Growth. 117:1992;166.
6. Svitashev K.K., Dvoretsky S.A., Sidorov Yu.G., Shvets V.A., Mordezhov A.S., Nis I.E., Varavin V.S., Liberman V., Remesnik V.G. Cryst. Res. Technol. 29:1994;931.
7. Svitashev K.K., Shvets V.A., Mardezhov A.S., Dvoretsky S.A., Sidorov Yu.G., Mikhailov N.N., Spesivtsev E.V., Rychlitsky S.V. Mater. Sci. Eng. B44:1997;164.
8. Rykhlitski S.V., Spesivtsev E.V., Shvets V.A. Proc. SPIE. 4900:2002;722.
9. Vina L., Umbach C., Cardona M., Vodopyanov L. Phys. Rev. B29:1984;6752.
10. MvLevige W.V., Arias J.M., Edwall D.D., Johnston S.L. J. Vac. Sci. Technol. B9:1991;2483.
11. Kim C.C., Sivananthan S. J. Electron. Mater. 26:1997;561.
12. Shvets V.A., Mikhailov N.N., Yakushev M.V., Spesivtsev E.V. Proc. SPIE. 4900:2002;46.
13. Azzam R.M.A., Bashara N.M. Ellipsometry and Polarized Light. 1977;North Holland, Amsterdam.