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Volumn 4900, Issue 1, 2002, Pages 46-52

Ellipsometric measurements of the optical constants of solids under impulse heating

Author keywords

Ellipsometry; Impulse heating; Mercury cadmium telluride; Optical contants; Rapid thermal processes

Indexed keywords

MERCURY COMPOUNDS; OPTICAL PROPERTIES; PYROLYSIS; RAPID THERMAL ANNEALING; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTING ZINC COMPOUNDS; SOLIDS; THERMAL EFFECTS;

EID: 0036449895     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.484591     Document Type: Conference Paper
Times cited : (8)

References (9)
  • 4
    • 0011953363 scopus 로고    scopus 로고
    • Laser ellipsometry - Precise method for surface measurement
    • this issue
    • S.V. Rykhlitski, E.V. Spesivtsev, V.A. Shvets, "Laser ellipsometry - precise method for surface measurement", this issue.
    • Rykhlitski, S.V.1    Spesivtsev, E.V.2    Shvets, V.A.3
  • 5
    • 0022809230 scopus 로고
    • Anew non-contact method to measure temperature of the surface of semiconductor wafers
    • T. Tomita, T. Kinosada, T. Yamashita, M. Shiota, T. Sakurai, "Anew Non-Contact Method to Measure Temperature of the Surface of Semiconductor Wafers", Jpn.J.Appl.Phys., 25, pp. L925-L927, 1986.
    • (1986) Jpn.J.Appl.Phys. , vol.25
    • Tomita, T.1    Kinosada, T.2    Yamashita, T.3    Shiota, M.4    Sakurai, T.5
  • 6
    • 0031997698 scopus 로고    scopus 로고
    • Possibility of simultaneous monitoring of temperature and surface layer thickness of Si substrate by in situ spectroscopic ellipsometry
    • Z.-T. Jiang, T. Tamaguchi M. Aoyama, and T. Hayashi, "Possibility of Simultaneous Monitoring of Temperature and Surface Layer Thickness of Si Substrate by In Situ Spectroscopic Ellipsometry", Jpn.J.Appl.Phys., 37, pp. 479-483, 1998.
    • (1998) Jpn.J.Appl.Phys. , vol.37 , pp. 479-483
    • Jiang, Z.-T.1    Tamaguchi, T.2    Aoyama, M.3    Hayashi, T.4
  • 7
    • 0011981797 scopus 로고    scopus 로고
    • The use of ellipsometric measurements for high sensitive monitoring of surface temperature
    • (in Russian)
    • M.V. Yakushev, V.A. Shvets, "The Use of Ellipsometric Measurements for High Sensitive monitoring of Surface Temperature", Pisma v Jurnal Tehnicheskoi Fiziki, 25, N14. pp.65-71, 1999, (in Russian).
    • (1999) Pisma v Jurnal Tehnicheskoi Fiziki , vol.25 , Issue.14 , pp. 65-71
    • Yakushev, M.V.1    Shvets, V.A.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.