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Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4900, Issue 2, 2002, Pages 722-729

Laser ellipsometry: Precise method of surface measurement

(3) Rykhlitski, S V a Spesivtsev, E V a Shvets, V A a

a INSTITUTE OF SEMICONDUCTOR PHYSICS (Russian Federation)

Author keywords

Film thickness measurement; High spatial resolution; Laser ellipsometry; Time resolved instruments

Indexed keywords

ALGORITHMS; ELLIPSOMETRY; LIGHT MEASUREMENT; LIGHT POLARIZATION; LIGHT REFLECTION; LIGHT REFRACTION; OPTICAL RESOLVING POWER; PHASE SHIFT; SUBSTRATES; SURFACE MEASUREMENT; THICKNESS MEASUREMENT; THIN FILMS;

FRESNEL REFLECTION COEFFICIENTS; LASER ELLIPSOMETRY; TIME RESOLVED INSTRUMENTS;

LASER APPLICATIONS;

EID: 0036450089 PISSN: 0277786X EISSN: None Source Type: Conference Proceeding
DOI: 10.1117/12.484455 Document Type: Conference Paper

Times cited : (3)

References (12)

1
- 0030645159
- Ellipsometry in science and engineering
- V.A. Shvets, S.V. Rykhlitski, "Ellipsometry in science and engineering", in Optoelectronics, Instrumentation and Data Processing, N1, 1997, pp. 5-17.
- (1997) Optoelectronics, Instrumentation and Data Processing , Issue.1 , pp. 5-17
- Shvets, V.A.¹ Rykhlitski, S.V.²

2
- 84975646109
- Dynamic imaging microellipsometry: Theory, system design, and feasibility demonstration
- R.F. Cohn, J.W. Wagner, J. Kruger, "Dynamic imaging microellipsometry: theory, system design, and feasibility demonstration", Appl.Opt., 1988, 27, No22, pp. 4664-4671.
- (1988) Appl. Opt. , vol.27 , Issue.22 , pp. 4664-4671
- Cohn, R.F.¹ Wagner, J.W.² Kruger, J.³

3
- 36549100146
- D. Beaglehole. Rev. Sci. Instrum. 59, 2557 (1988).
- (1988) Rev. Sci. Instrum. , vol.59 , pp. 2557
- Beaglehole, D.¹

4
- 0001712178
- High resolution imaging microellipsometry of soft surfaces at 3 μm lateral and 5 Å normal resolution
- Jun 8
- A. Albersdöfer, G. Elender, G. Mathe, K.R. Neumaier, P. Padushek, "High resolution imaging microellipsometry of soft surfaces at 3 μm lateral and 5 Å normal resolution", Appl.Phys.Lett., vol. 72, n 23, Jun 8, 1998, pp. 2930-2932.
- (1998) Appl. Phys. Lett. , vol.72 , Issue.23 , pp. 2930-2932
- Albersdöfer, A.¹ Elender, G.² Mathe, G.³ Neumaier, K.R.⁴ Padushek, P.⁵

5
- 36549094974
- Spatially resolved ellipsometry
- M. Erman, J.B. Theeten, "Spatially resolved ellipsometry", J.Appl.Phys, 1986, 60(3), P.859.
- (1986) J. Appl. Phys , vol.60 , Issue.3 , pp. 859
- Erman, M.¹ Theeten, J.B.²

6
- 0029632699
- Scanning microellipsometry for extraction of true topography
- Mar 2
- R.D. Holmes, C.W. See, M.G. Somekh, "Scanning microellipsometry for extraction of true topography", Electronics Letters, v. 31, n. 5, Mar 2, 1995, pp. 358-359.
- (1995) Electronics Letters , vol.31 , Issue.5 , pp. 358-359
- Holmes, R.D.¹ See, C.W.² Somekh, M.G.³

7
- 0011964514
- High-spatial resolution ellipsometry
- E.V. Spesivtsev, S.V. Rykhlitski, "High-spatial resolution ellipsometry", Optoelectronics, Instrumentation and Data Processing, N1, 1997, pp. 66-69.
- (1997) Optoelectronics, Instrumentation and Data Processing , Issue.1 , pp. 66-69
- Spesivtsev, E.V.¹ Rykhlitski, S.V.²

8
- 0011925687
- R.M.A. Aspnes, Proc. Soc. Photo-Opt. Instrum. Eng., 2873 (1993) 1.
- (1996) Proc. Soc. Photo-Opt. Instrum. Eng. , vol.2873 , pp. 1
- Aspnes, R.M.A.¹

9
- 0011955595
- E. Collet, Surf. Sci. 96 (1980) 156.
- (1980) Surf. Sci. , vol.96 , pp. 156
- Collet, E.¹

10
- 0001523349
- K. Brudzewski, J. Mod. Opt. 38 (1991) 889.
- (1991) J. Mod. Opt. , vol.38 , pp. 889
- Brudzewski, K.¹

11
- 0011925867
- Ellipsometer
- Inventor's certificate RF No16314 of 20.12
- E.V. Spesivtsev, S.V. Rykhlitski, "Ellipsometer", Inventor's certificate RF No16314 of 20.12.2000.
- (2000)
- Spesivtsev, E.V.¹ Rykhlitski, S.V.²

12
- 4244002424
- State unified measurement system
- USSR Standart Committee (in Russia), SNII Metrologii, Novosibirsk
- State unified measurement system, USSR Standart Committee (in Russia), SNII Metrologii, Novosibirsk, 1997.
- (1997)

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