Spectroscopic ellipsometry (SE) and grazing X-ray reflectometry (GXR) analyses on tungsten carbide films for diffusion barrier in copper metallization schemes

Thin Solid Films

Volumn 455-456, Issue , 2004, Pages 519-524

  Sun, Lianchao ^a   Fouere, Jean Claude ^a   Sammet, Timo ^b   Hatzistergos, Michael ^b   Efstathiadis, Harry ^b  

^a SOPRA   (France)

^b STATE UNIVERSITY OF NEW YORK   (United States)

Author keywords

Diffusion barrier; Grazing X Ray reflectometry; Spectroscopic ellipsometry

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COPPER; ELLIPSOMETRY; METALLIZING; OPTICAL PROPERTIES; SPECTROSCOPIC ANALYSIS; SURFACE ROUGHNESS; TUNGSTEN CARBIDE; X RAY DIFFRACTION ANALYSIS;

DIFFUSION BARRIERS; GRAZING X-RAY REFLECTOMETRY; SPECTROSCOPIC ELLIPSOMETRY;

METALLIC FILMS;

EID: 17144440682     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2004.01.058     Document Type: Conference Paper

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