A new versatile instrument for characterization of thin films and multilayers using spectroscopic ellipsometry and grazing X-ray reflectance

Physica Status Solidi (A) Applied Research

Volumn 170, Issue 2, 1998, Pages 211-220

  Boher, P ^a   Stehle, J L ^a  

^a SOPRA   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ELLIPSOMETRY; MULTILAYERS; OPTICAL DEVICES; PHOTOMETRY; REFLECTION; SPECTRUM ANALYSIS; THIN FILMS;

GRAZING X RAY REFLECTANCE; SPECTROSCOPIC ELLIPSOMETRY;

OPTICAL FILMS;

EID: 0032295619     PISSN: 00318965     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1521-396X(199812)170:2<211::AID-PSSA211>3.0.CO;2-M     Document Type: Article

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