Self-annealing textures of copper damascene interconnects

Materials Science Forum

Volumn 467-470, Issue II, 2004, Pages 1333-1338

  Lee, Dong Nyung ^a   Lee, Hyo Jong ^a  

^a Seoul National University   (South Korea)

Author keywords

Copper; Damascene interconnect; EBSD; Self annealing texture

Indexed keywords

ANNEALING; CRYSTALLOGRAPHY; ELASTIC MODULI; LITHOGRAPHY; METALLIC FILMS; MICROSTRUCTURE; THERMAL EFFECTS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

COPPER DAMASCENE INTERCONNECTS; DAMASCENE INTERCONNECTS; EBSD; SELF-ANNEALING TEXTURES;

COPPER;

EID: 17144369202     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/msf.467-470.1333     Document Type: Conference Paper

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