Microstructure of sol-gel ZnO thin films fabricated using ethanolamine and hydroxyketone modifiers

Journal of the Ceramic Society of Japan

Volumn 113, Issue 1315, 2005, Pages 220-225

  Ohya, Yutaka ^a   Ogata, Takatomo ^a   Ban, Takayuki ^a   Takahashi, Yasutaka ^a,b  

^a GIFU UNIVERSITY   (Japan)

^b Daiken Chemical Co Ltd   (Japan)

Author keywords

Blicated structure; Ethanolamine; Hydroxyketone; Orientation; Sol gel; Zinc oxide film

Indexed keywords

ALCOHOLS; AMINES; CRYSTAL ORIENTATION; KETONES; MICROSTRUCTURE; POSITIVE IONS; SCANNING ELECTRON MICROSCOPY; SOL-GELS; THERMOANALYSIS; THERMOGRAVIMETRIC ANALYSIS; TRANSMISSION ELECTRON MICROSCOPY; ZINC OXIDE;

BLICATED STRUCTURE; ETHANOLAMINE; HYDROXYKETONES; ORIENTATION; ZINC OXIDE FILM;

THIN FILMS;

EID: 17044386645     PISSN: 09145400     EISSN: None     Source Type: Journal    
DOI: 10.2109/jcersj.113.220     Document Type: Article

References (20)

1. Minami, T., Nanto, H. and Takata, S., Jpn. J. Appl. Phys., Vol. 23, pp. L280-L282 (1984).
2. Hu, J. and Cordon, R. G., J. Appl. Phys., Vol. 71, pp. 880-890 (1992).
3. Kawasaki, M. and Ohtomo, A., Kotai Butsuri, Vol. 33, pp. 59-64 (1998) [in Japanese].
4. Ohta, H., Mizoguchi, H., Hirano, M., Narushima, S., Kamiya, T. and Hosono, H., J. Appl. Phys., Vol. 89, pp. 5720-5725 (2001).
5. Seiyama, T., Kato, A., Fujiishi, K. and Nagatani, M., Anal. Chem., Vol. 34, pp. 1502-1503 (1962).
6. Martin, S. J., Gunshor, R. L., Pierret, R. F. and Gorodetsky, G., Electron. Lett., Vol. 18, pp. 1030-1031 (1982).
7. Ohya, Y., Niwa, T., Ban, T. and Takahashi, Y., Jpn. J. Appl. Phys., Vol. 40, pp. 297-298 (2001).
8. Hoffman, R. L., Norris, B. J. and Wager, J. F., Appl. Phys. Lett., Vol. 82, pp. 733-735 (2003).
9. Nishii, J., Hossain, F. M., Takagi, S., Aita, T., Saikusa, K., Ohmaki, Y., Ohkubo, I., Kishimoto, S., Ohtomo, A., Fukumura, T., Matsukura, F., Ohno, Y., Koinuma, H., Ohno, H. and Kawasaki, M., Jpn. J. Appl. Phys., Vol. 42, pp. L347-L349 (2003).
10. Ohya, Y., Saiki, H. and Takahashi, Y., J. Mater. Sci., Vol. 29, pp. 4099-4103 (1994).
11. Ohya, Y., Saiki, H., Tanaka, T. and Takahashi, Y., J. Am. Ceram. Soc., Vol. 79, pp. 825-830 (1996).
12. Ohya, Y., Ueda, M. and Takahashi, Y., Jpn. J. Appl. Phys., Vol. 35, pp. 4738-4742 (1996).
13. Ohya, Y., Koyama, K., Ban, T. and Takahashi, Y., Mater. Sci. Eng., Vol. B54, pp. 55-59 (1998).
14. Ohyama, M., Kozuka, H., Yoko, T. and Sakka, S., J. Ceram. Soc. Japan, Vol. 104, pp. 296-300 (1996).
15. Takahashi, Y., Ohsugi, A., Arafuka, T., Ohya, T., Ban, T. and Ohya, Y., J. Sol-Gel Sci. Tech., Vol. 17, pp. 227-238 (2000).
16. Ohya, T., Kabata, M., Ban, T., Ohya, Y. and Takahashi, Y., J. Sol-Gel Sci. Tech., Vol. 25, pp. 43-50 (2002).
17. Syukri, Terazawa, T., Ban, T., Ohya, Y. and Takahashi, Y., "Ceramic Processing Science VI, Ceramics Transactions Vol. 112," American Ceramic Society (2001) pp. 329-334.
18. Kozuka, H., Takenaka, S., Tokita, H., Hirano, T., Higashi, Y. and Hamatani, T., J. Sol-Gel Sci. Tech., Vol. 26, pp. 681-686 (2003).
19. Ban, T., Ohya, Y. and Takahashi, Y., J. Sol-Gel Sci. Tech., Vol. 27, pp. 363-372 (2003).
20. Ohya, Y., Mishina, J., Matsuda, T., Ban, T. and Takahashi, Y., J. Am. Ceram. Soc., Vol. 82, pp. 2601-2606 (1999).