Acoustic impedance elements modeling oscillating gas flow in micro channels

2001 International Conference on Modeling and Simulation of Microsystems - MSM 2001

Volumn , Issue , 2001, Pages 96-99

  Veijola, T ^a  

^a AALTO UNIVERSITY   (Finland)

Author keywords

Acoustic Impedance; Gas Flow in Microstructures; Gas Flow in Rectangular Channels; Oscillating Gas Flow; Slip flow

Indexed keywords

BOUNDARY CONDITIONS; CAPACITANCE; DAMPING; EQUIVALENT CIRCUITS; FLOW OF FLUIDS; FREQUENCY DOMAIN ANALYSIS; MATHEMATICAL MODELS; MICROSTRUCTURE; OSCILLATIONS; PRESSURE EFFECTS; REYNOLDS NUMBER;

GAS FLOW IN MICROSTRUCTURES; GAS FLOW IN RECTANGULAR CHANNELS; OSCILLATING GAS FLOW; SLIP FLOW;

ACOUSTIC IMPEDANCE;

EID: 6344220319     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

1. T. Veijola, H. Kuisma, J. Lahdenperä, and T. Ryhänen, "Equivalent Circuit Model of the Squeezed Gas Film in a Silicon Accelerometer," Sensors and Actuators A, vol. 48, pp. 239-248, 1995.
2. L. J. Sivian, "Acoustic Impedance of Small Orfices," Journal of the Acoustical Society of America, vol. 7, pp. 94-101, 1935.
3. J. K. Wood and G. B. Thurston, "Acoustic Impedance of Rectangular Tubes," Journal of the Acoustical Society of America, vol. 25, pp. 858-860, 1953.
4. F. Sharipov, "Rarefied Gas Flow Through a Long Rectangular Channel," J. Vac. Sci. Technol. A, vol. 17, no. 5, pp. 3062-3066, 1999.
5. A. Burgdorfer, "The Influence of the Molecular Mean Free Path on the Performance of Hydrodynamic Gas Lubricated Bearings," Journal of Basic Engineering, Trans. ASME, vol. 81, pp. 94-99, March 1959.
6. S. Fukui and R. Kaneko, "Analysis of Ultra-Thin Gas Film Lubrication Based on Linearized Boltzmann Equation: First Report - Derivation of a Generalized Lubrication Equation Including Thermal Creep Flow," Journal of Tribology, Trans. ASME, vol. 110, pp. 253-262, April 1988.
7. R. B. Darling, C. Hivick, and J. Xu, "Compact Analytical Modeling for Squeeze Film Damping with Arbitrary Venting Conditions Using a Green's Function approach," Sensors and Actuators A, vol. 70, pp. 32-41, 1998.
8. T. Veijola, K. Ruokonen, and I. Tittonen, "Compact Squeezed-Film Damping Model Including the Open Border Effects," Proceedings of MSM 2001, (Hilton Head), April 2001.