Particulates generation and solutions for their elimination in pulsed laser deposition

Journal of Optoelectronics and Advanced Materials

Volumn 6, Issue 1, 2004, Pages 39-46

  Gyorgy E ^a   Mihailescu, I N ^a   Kompitsas, M ^b   Giannoudakos, A ^b  

^a INSTITUTE OF ATOMIC PHYSICS   (Romania)

^b INSTITUTE OF BIOLOGY   (Greece)

Author keywords

Particulates; Pulsed laser irradiation; Synchronised laser systems; Thin films deposition

Indexed keywords

COMPUTER SIMULATION; CONDENSATION; LASER ABLATION; LASER PULSES; MAGNETIC FILTERS; PLASMAS; PULSED LASER DEPOSITION; THIN FILMS;

PARTICULATES; PULSED LASER IRRADIATION; SYNCHRONIZED LASER SYSTEMS; THIN FILM DEPOSITION;

PARTICLES (PARTICULATE MATTER);

EID: 16744366342     PISSN: 14544164     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (38)

1. D. B. Chrisey, G. K. Hubler (eds), "Pulsed Laser Deposition of Thin Films", Wiley, New York, 1994
2. nd edn., Springer, Berlin, 1995
3. nd edn., Springer, Berlin, 1996.
4. W. W. Duley, "UV Lasers: effects and applications in materials science", University Press, Cambridge, 1996.
5. I. N. Mihailescu, E. Gyorgy, "Pulsed Laser Deposition: An Overview", Invited contribution to the 4-th International Commission for Optics (ICO) Book "Trends in Optics and Photonics", ed. T. Asakura (ICO President) Springer Series in Optical Science, pp. 201, 1999.
6. K. Murakami, in "Laser Ablation of Electronic Materials - Basic Mechanisms and Applications", ed. By E. Fogarassy, S. Lazare, Elsevier, Amsterdam, 125, 1992.
7. R. Kelly, J. Rothenberg, Nucl. Instrum. Methods B 7/8, 755 (1985).
8. A. B. Brailovsky, S. V. Gaponov, V. I. Luchin, Appl. Phys. A 61, 81 (1995).
9. E. Agostinelli, S. Kaciulis, M. Vittori-Antisari, Appl. Phys. Sci. 156, 143 (2000).
10. N. Inoue, S. Kashiwabara, S. Toshima, R. Fujimoto, Appl. Surf. Sci. 96-98, 656 (1996).
11. Y. Watanabe, M. Tanamura, S. Matsumoto, Y. Seki, J. Appl. Phys. 78, 2029 (1995).
12. T. E. Itina, A. A. Katassonov, W. Marine, M. Autric, J. Appl. Phys. 83, 6050 (1998).
13. D. Lubben, S. A. Barnett, K. Suzuki, S. Gorbatkin, J. E. Greene, J. Vac. Sci. Techn. B 3, 968 (1985).
14. S. J. Barrington, T. Bhutta, D. P. Shepherd, R. W. Eason, Optics Communication 185, 145 (2000).
15. R. Jordan, D. Cole, J. G. Lunney, Appl. Surf. Sci. 109-110, 403 (1997).
16. R. Dat, O. Auciello, D. J. Lichtenwalner, A. I. Kingon, J. Mater. Res. 11, 1514 (1996).
17. P. Mukherjee, S. Chen, J. B. Cuff, P. Sakthivel, S. Witanachchi, J. Appl. Phys. 91, 1828 (2002).
18. G. Koren, R. J. Baseman, A. Gupta, M. I. Lutwyche, R. B. Laibowitz, Appl. Phys. Lett. 56, 2144 (1990).
19. H. Chiba, K. Murakami, O. Eryu, K. Shihoyama, T. Mochizuki, K. Masuda, Jpn. J. Appl. Phys. 30, L 732 (1991).
20. C. H. Becker, J. B. Pallix, J. Appl. Phys. 64, 5152 (1988).
21. V. S. Teodorescu, I. N. Mihailescu, E. Gyorgy, A. Luches, M. Martino, L. C. Nistor, J. Van Landuyt, J. Hermann, J. Mod. Opt. 43, 1773 (1996).
22. I. N. Mihailescu. Lita, V. S. Teodorescu, E. Gyorgy, R. Alexandrescu, A. Luches, M. Martino, A. Barborica, J. Vac. Sci. Technol. A, 14, 1986 (1996).
23. G. Leggieri, A. Luches, M. Martino, A. Perrone, R. Alexandrescu, A. Barborica, E. Gyorgy, I. N. Mihailescu, G. Majni, P. Mengucci, Appl. Surf. Sci. 96, 866 (1996).
24. N. Chitica, E. Gyorgy, A. Lita, G. Marin, I. N. Mihailescu, D. Pantelica, M. Petrascu, A. Hatziapostolou, C. Grivas, N. Broil, A. Cornet, C. Mirica, A. Andrei, Thin Solid Films, 301, 71 (1997).
25. I. N. Mihailescu, V. S. Teodorescu, E. Gyorgy, A. Luches, A. Perrone, M. Martino, J. Phys. D: Appl. Phys. 31, 2236 (1998).
26. I. N. Mihailescu, E. Gyorgy, V. S. Teodorescu, Gy. Steinbrecher, J. Neamtu, A. Perrone, A. Luches, J. Appl. Phys. 86, 7123 (1999).
27. E. Gyorgy, I. N. Mihailescu, M. Kompitsas, A. Giannoudakos, Appl. Surf. Sci. 195, 270 (2002).
28. E. Gyorgy, I. N. Mihailescu, M. Kompitsas, A. Giannoudakos, Thin Solid Films, 446 (2), 178 (2004).
29. A. Miotello, R. Kelly, Appl. Phys. Lett. 67, 3535 (1995).
30. N. M. Bulgakova, A. V. Bulgakov, Appl. Phys. A. Mater. Sci. Process. 73, 199 (2001).
31. D. H. Lowndes, C. M. Rouleau, T. G. Thundat, E. A. Kenik, S. J. Pennycook, J. Mater. Res. 14, 359 (1999).
32. M. Inada, I. Umezu, A. Sugimura, J. Vac. Sci. Technol. A 21, 84 (2003).
33. W. Marine, L. Patrone, B. Luk'yanchuk, M. Sentis, Appl. Surf. Sci. 154-155, 345 (2000).
34. T. Hino, M. Nishida, T. Araki, Surf. Coat. Technol. 149, 1 (2002).
35. M. Von Allmen, J. Appl. Phys. 47, 5460 (1976).
36. J. Neamtu, I. N. Mihailescu, C. Ristoscu, J. Herman, J. Appl. Phys. 86 (1999) 6096
37. R. T. Aratyunyan, V. Yu. Baranov, L. A. Bolshov, D. D. Malyuta, A. Yu. Sebrant, "Laser Beam Effects on Materials", Nauka, Moscow, 1989 (in Russian).
38. B. Hopp, N. Kresz, Cs. Vass, Z. Toth, T. Smausz, F. Ignacz, Appl. Surf. Sci. 186, 298 (2002).