Gaseous precursors of diamond-like carbon films: Chemical composition of CH4/Ar plasmas

Vacuum

Volumn 61, Issue 2-4, 2001, Pages 211-215

  Riccardi, C ^a   Barni, R ^a   Sindoni, E ^a   Fontanesi, M ^a   Tosi, P ^b  

^a UNIVERSITY OF MILANO BICOCCA   (Italy)

^b UNIVERSITY OF TRENTO   (Italy)

Author keywords

Chemical kinetics; Diamond like carbon film; Gas phase composition; Methane argon plasmas; Plasma devices modelling; RF discharges

Indexed keywords

ARGON; KINETIC THEORY OF GASES; MATHEMATICAL MODELS; METHANE; PHASE SEPARATION;

DIAMOND-LIKE CARBON FILMS;

PLASMAS;

EID: 0035858514     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(01)00115-4     Document Type: Conference Paper

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