Modelling and fabrication of step height control of a multilevel Si(100) structure in KOH solution

Journal of Micromechanics and Microengineering

Volumn 14, Issue 3, 2004, Pages 341-346

  Chung, Chen Kuei ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

MULTILEVEL STRUCTURES; PHOTOMASKS;

ANISOTROPY; CRYSTALLOGRAPHY; DEPOSITION; ETCHING; MASKS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PHOTOLITHOGRAPHY; POTASSIUM COMPOUNDS; SOLUTIONS; THIN FILMS;

SILICON;

EID: 1642619077     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/3/005     Document Type: Article

References (10)

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