Study on convex-corner undercutting formed by masked-maskless etching in aqueous KOH

Journal of Micromechanics and Microengineering

Volumn 10, Issue 3, 2000, Pages 309-313

  Li, Xinxin ^a   Lin, Rongming ^a   Miao, Jianmin ^a   Bao, Minhang ^b  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b FUDAN UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; MICROSTRUCTURE; POTASSIUM COMPOUNDS; SILICON;

POTASSIUM HYDROXIDE;

MICROMACHINING;

EID: 0034274336     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/10/3/302     Document Type: Article

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