Deposition of device quality μc-Si films and solar cells at high rates by HWCVD in a W filament regime where W/Si formation is minimal

Materials Research Society Symposium - Proceedings

Volumn 762, Issue , 2003, Pages 643-648

  Iwaniczko, E ^a   Mahan, A H ^a   Yan, B ^b   Gedvilas, L N ^a   Williamson, D L ^c   Nelson, B P ^a  

^a NATIONAL RENEWABLE ENERGY LABORATORY   (United States)

^b United Solar Systems Corp   (United States)

^c Department of Metallurgical and Materials Engineering   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DISSOCIATION; ENERGY GAP; FILM GROWTH; INFRARED SPECTROSCOPY; LOW TEMPERATURE EFFECTS; SOLAR CELLS; SUBSTRATES; TUNGSTEN COMPOUNDS; X RAY DIFFRACTION;

DOPANT LAYERS; SINGLE JUNCTION DEVICES;

SEMICONDUCTING FILMS;

EID: 1642500368     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-762-a6.9     Document Type: Conference Paper

References (14)

1. T. Roschek, T. Repmann, O. Kluth, J. Muller, B. Rech, and H. Wagner, Mater. Res. Soc. 715 (2002) A26.5.
2. S. Klein, F. Finger, R. Carius, B. Rech, L. Houben, M. Luysberg, and M. Stutzmann: Mater. Res. Soc. 715 (2002) A26.2.
3. R.E.I. Schropp, C.H.M. Van Der Werf, M.K. van Veen, P.A.T.T. van Veenendaal, R. Jimenez Zambrano, Z. Hartman, J. Loffler, and J.K. Rath: Mater. Res. Soc. 664 (2001) A15.6.
4. R.E.I. Schropp, Y. Xu, E. Iwaniczko, G.A. Zaharias, and A.H. Mahan: Mater. Res. Soc. 715, (2002) A26.3.
5. st International Conference on Cat-CVD (Hot-Wire CVD) Process', published in Thin Solid Films 395 (2001).
6. J. Doyle, R. Robertson, G.H. Lin, M.Z. He, and A.C. Gallagher, J. Appl. Phys. 64 (1988) 3215.
7. P.A.T.T. van Veenendaal, O.L.J. Gijzeman, J.K. Rath, and R.E.I. Schropp, Thin Solid Films 395 (2001) 194.
8. A.H. Mahan, A. Mason, B.P. Nelson, and A.C. Gallagher, Mater. Res. Soc. 609, (2000) A6.6.
9. Q Wang, E. Iwaniczko, Y. Xu, B.P. Nelson, A.H. Mahan, R.S. Crandall, and H.M. Branz, Twenty-Eighth IEEE PV Specialists Conference (2000) 717-720.
10. G.A. Zaharias, A.H. Mahan, R.E.I. Schropp, Y. Xu, D.L. Williamson, M.M. Al-Jassim, M.J. Romero, and L.M. Gedvilas, Mater. Res. Soc. 715 (2002) A26.2.
11. J.K Rath, F.D. Tichelaar, H. Meiling, and R.E.I. Schropp, Mater. Res. Soc. 507 (1998) 879.
12. A. H. Mahan, private communication.
13. E. Iwaniczko, Y. Xu, R.E.I. Schropp, Q. Wang, and A.H. Mahan, NREL/CP-520-30476 (2002) 67.
14. J. Meier, P. Torres, R. Platz, S. Dubail, U. Kroll, J.A. Anna Selvan, N. Pellaton Vaucher, Ch. Hof, D. Fischer, H. Keppner, A. Shah, K.-D. Ufert, P. Giannoules, and J. Koehler, Mater. Res. Soc. 420 (1996) 3.