Gettering Strategies for SOI Wafers

Solid State Phenomena

Volumn 95-96, Issue , 2004, Pages 547-552

  Istratov, A A ^a   Huber, W ^b   Weber, E R ^a  

^a University of California Berkeley   (United States)

^b Sumco USA ^*  (United States)

Author keywords

Gettering; Iron; Polysilicon; Silicon Dioxide; SOI

Indexed keywords

ANNEALING; COOLING; DIFFUSION IN SOLIDS; DOPING (ADDITIVES); HIGH TEMPERATURE EFFECTS; IMPURITIES; IRON OXIDES; POLYSILICON; PRECIPITATION (CHEMICAL); SECONDARY ION MASS SPECTROMETRY; SEGREGATION (METALLOGRAPHY); SILICON WAFERS; SUPERSATURATION; TRANSMISSION ELECTRON MICROSCOPY;

BURIED OXIDE (BOX) LAYERS; INTERNAL GETTERING;

SILICON ON INSULATOR TECHNOLOGY;

EID: 1642475312     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: None     Document Type: Conference Paper

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