SCOPUS 정보 검색 플랫폼

Materials Research Society Symposium - Proceedings

Volumn 762, Issue , 2003, Pages 437-442

Effects of excitation frequency and H2 dilution on cluster generation in silane high-frequency discharges

(5) Shiratani, Masaharu a Koga, Kazunori a Harikai, Atsushi a Ogata, Takanori a Watanabe, Yukio a

a KYUSHU UNIVERSITY (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; DEGRADATION; DEPOSITION; GROUNDING ELECTRODES; HYDROGENATION; LIGHT SCATTERING; MICROSTRUCTURE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; REDUCTION; SEPARATION; SOLAR CELLS; STAINLESS STEEL; TRANSMISSION ELECTRON MICROSCOPY;

CLUSTER GENERATION; LIGHT-INDUCED DEFECTS;

SILANES;

EID: 1642459373 PISSN: 02729172 EISSN: None Source Type: Journal
DOI: 10.1557/proc-762-a9.5 Document Type: Article

Times cited : (4)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.