SCOPUS 정보 검색 플랫폼

Volumn , Issue , 2002, Pages 107-110

A test structure for the design of thermal flow sensors

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DESIGN; ELECTRIC HEATING ELEMENTS; FLOW OF FLUIDS; MEMBRANES; OPTIMIZATION; TEMPERATURE DISTRIBUTION; THERMAL CONDUCTIVITY;

CALORIMETRIC FLOW SENSOR; SENSING RESISTORS; TEST STRUCTURE; THERMAL FLOW SENSORS;

SENSORS;

EID: 0012579077 PISSN: None EISSN: None Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper

Times cited : (8)

References (9)

1
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- D.Moser, R.Lengeenhager, G.Wachutka and H.Baltes "Fabrication and modelling of CMOS microbridge gas-flow sensors", Sensors and Actuators B, 6 (165-169) 1992
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- Moser, D.¹ Lengeenhager, R.² Wachutka, G.³ Baltes, H.⁴

2
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- Intelligent gas-mixture flow sensor
- T.S.J.Lammerink, F.Dijkstra, Z.Houkes, J. van Kuijk "Intelligent gas-mixture flow sensor", Sensors and Actuators A, 46-47 (380-384) 1995
- (1995) Sensors and Actuators A , vol.46-47 , pp. 380-384
- Lammerink, T.S.J.¹ Dijkstra, F.² Houkes, Z.³ Van Kuijk, J.⁴

3
- 0033537521
- Thermal flow sensor for liquid and gases based on combinations of two principles
- M.Ashauer, H.Glosch, F.Hedrich, N.Hey, H.Sandmaier, W.Lang "Thermal flow sensor for liquid and gases based on combinations of two principles", Sensors and Actuators, 73 (7-13) 1999
- (1999) Sensors and Actuators , vol.73 , pp. 7-13
- Ashauer, M.¹ Glosch, H.² Hedrich, F.³ Hey, N.⁴ Sandmaier, H.⁵ Lang, W.⁶

4
- 0025698992
- Integrated thermopile sensors
- A.W.van Herwaarden, D.C.van Duyn, B.W. van Oudheusden and P.M.Sarro "Integrated thermopile sensors" Sensors and Actuators, A21-A23 (621-630) 1989
- (1989) Sensors and Actuators , vol.A21-A23 , pp. 621-630
- Van Herwaarden, A.W.¹ Van Duyn, D.C.² Van Oudheusden, B.W.³ Sarro, P.M.⁴

5
- 0027615153
- A high sensitivity CMOS gas flow sensor on a thin dielectric membrane
- D.Moser and H.Baltes "A high sensitivity CMOS gas flow sensor on a thin dielectric membrane" Sensors and Actuators A, 37-38 (33-37) 1993
- (1993) Sensors and Actuators A , vol.37-38 , pp. 33-37
- Moser, D.¹ Baltes, H.²

6
- 0029759774
- Scaling of thermal CMOS gas flow microsensors: Experiment and simulation
- F.Mayer, G.Salis, J.Funk, O.Paul and H.Baltes "Scaling of thermal CMOS gas flow microsensors: experiment and simulation", Proceedings IEEE, The Ninth Annual International Workshop on Micro Electro Mechanical Systems, (116-121) 1996
- (1996) Proceedings IEEE, The Ninth Annual International Workshop on Micro Electro Mechanical Systems , pp. 116-121
- Mayer, F.¹ Salis, G.² Funk, J.³ Paul, O.⁴ Baltes, H.⁵

7
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- Heat transport from a chip
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- Lang, W.¹

8
- 0003538376
- IFI Plenum, New York
- J.T.Milek Silicon Nitride for Microelectronic Applications, Part 1: Preparation an Properties IFI Plenum, New York 1971
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- Milek, J.T.¹

9
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- Specific problems of FEM thermal simulations for microsystems
- A.Götz, C.Cané and E.Lora-Tamayo "Specific problems of FEM thermal simulations for microsystems", Proc. of the First International Conference on Simulation and Design of Microsystems and Microstructures microSIM 95, 1995
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- Götz, A.¹ Cané, C.² Lora-Tamayo, E.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.