Micro/nano machining of polymeric substrates by ion beam techniques

Microelectronic Engineering

Volumn 65, Issue 1-2, 2002, Pages 153-161

  He, W ^b   Poker, D B ^c   Gonsalves, K E ^a   Batina, N ^d  

^a UNIVERSITY OF NORTH CAROLINA AT CHARLOTTE   (United States)

^b UNIVERSITY OF CONNECTICUT   (United States)

^c OAK RIDGE NATIONAL LABORATORY   (United States)

^d DEPARTAMENTO DE QUÍMICA   (Mexico)

Author keywords

Hydrophobicity; Ion implantation; Microfabrication; PMMA

Indexed keywords

ATOMIC FORCE MICROSCOPY; HYDROPHOBICITY; ION BEAM LITHOGRAPHY; ION IMPLANTATION; POLYMETHYL METHACRYLATES; SURFACE PHENOMENA;

SURFACE HYDROPHOBICITY;

MICROMACHINING;

LITHOGRAPHY;

EID: 0036891850     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(02)00847-X     Document Type: Article

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