Automated Grain Orientation Measurement by Backscatter Kikuchi Diffraction

Physics of Metals and Metallography

Volumn 96, Issue SUPPL., 2003, Pages

  Schwarzer, R A ^a  

^a CLAUSTHAL UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

ACOM; Analysis of Local Texture; ANN; Backscatter Kikuchi Diffraction (BKD); Copper Interconnects; Crystal Orientation Mapping (COM); Electron BackScatter Diffraction (EBSD); FFT; Magnesium Alloys; Radon Transformation

Indexed keywords

EID: 1642356595     PISSN: 0031918X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Review

References (32)

1. Bunge, H.J., Crystallographic Texture and Plastic Anisotropy, in Formability of Metallic Materials, Banabic, D., Bunge, H.-J., Pöhlandt, K., and Tekkaya, A.E., Eds., Berlin: Springer, 2000, pp. 23-60.
2. Bunge, H.J. and Schwarzer, R.A., Orientation Stereology - A New Branch in Texture Research, Adv. Eng. Mater., 2001, vol. 3, pp. 25-39.
3. Electron Backscatter Diffraction in Materials Science, Schwartz, A.J., Kumar, M., and Adams, B.L., Eds., Dordrecht: Kluwer Academic, 2000.
4. Schwarzer, R.A. and Sukkau, J., Automated Crystal Orientation Mapping (ACOM) with a Computer-Controlled TEM by Interpreting Transmission Kikuchi Patterns, Mater. Sci. Forum, 1998, vols. 273-275, pp. 15-222.
5. Gerth, D. and Schwarzer, R.A., Graphical Representation of Grain and Hillock Orientations in Annealed Al-1% Si Films, Textures Microstruct., 1993, vol. 21, pp. 177-193.
6. Schwarzer, R.A., Phase Discrimination by Automated BKD, Anal. Bioanal. Chem., 2002, vol. 374, pp. 699-702.
7. Goehner, R.P. and Michael, J.R., Phase Identification in a Scanning Electron Microscope using Backscattered Electron Kikuchi Patterns, J. Res. Natl. Inst. Stand. Technol., 1996, vol. 101, pp. 301-308.
8. Adams, B.L., Wright, S.I., and Kunze, K., Orientation Imaging: The Emergence of a New Microscopy, Metall. Trans. A, 1993, vol. 24A, pp. 819-831.
9. Schwarzer, R.A. and Kunze, K., The Characterization of Microtexture by Orientation Mapping Microscopy, Adv. X-ray Anal., 1995, vol. 38, pp. 547-550.
10. Schwarzer, R.A., Automated Crystal Lattice Orientation Mapping Using a Computer-Controlled SEM, Micron, 1997, vol. 28, pp. 249-265.
11. Schwarzer, R.A., Development of BKD Hardware: Accomplishments and Opportunities, Proc. Microscopy and Microanalysis'99, Oregon 1999, Microscopy Microanal., 1999, vol. 5, Suppl. 2, pp. 242-243.
12. Schwarzer, R. A., Advancements of ACOM and Applications to Orientation Stereology, Proc. 12th Int.. Conf. on Textures of Materials (ICOTOM 12), Szpunar, J.A., Ed., Montreal: NRC Res., 1999, pp. 52-61.
13. Krieger Lassen, N.C., Automated Determination of Crystal Orientations from Electron Backscattering Patterns, PhD Thesis, Lyngby: Danemarks Tekniske Universitet, 1994.
14. Krieger Lassen, N.C., Juul Jensen, D., and Conradsen, K., Image Processing Procedures for Analysis of Electron Backscattering Patterns, Scan. Microscopy, 1992, vol. 6, pp. 115-121.
15. Schwarzer, R.A. and Sukkau, J., Automated Evaluation of Kikuchi Patterns by Means of Radon and Fast Fourier Transformation, and Verification by an Artificial Neural Network, Adv. Eng. Mater., 2003, vol. 5, pp. 601-606.
16. Radon, J., Über die Bestimmung von Funktionen durch ihre Integralwerte längs gewisser Mannigfaltigkeiten, Ber. Sächsische Akademie Wissensch. (Leipzig), 1917, pp. 262-276.
17. Deans, S.R., The Radon Transform and Some of Its Applications, New York: Wiley, 1983.
18. Zaefferer, S. and Schwarzer, R.A., Automated Measurement of Single Grain Orientations in the TEM, Z. Metallkd., 1994, vol. 85, pp. 585-591.
19. Schwarzer, R.A., Automated Electron Backscatter Diffraction - Present State and Prospects, in Electron Backscatter Diffraction in Materials Science, Schwartz, A.J., Kumar, M., and Adams, B.L., Eds., Dordrecht: Kluwer Academic, 2000, pp. 105-122.
20. Morneburg, H., Bildgebende Systeme für die medizinische Diagnostik, Munich: Siemens & Publicis MCD Verlag, 1995.
21. Schwarzer, R.A., Preparation of High-Resistance or Sensitive Samples for Grain Orientation Measurement with Electron Microscopes, Mater. Sci. Forum, 1994, vols. 157-162, pp. 201-206.
22. Schwarzer, R.A., Automated Crystal Orientation Mapping (ACOM) of Thin Metallization Layers and Interconnects, Mater. Res. Soc. Symp. Proc., 1997, vol. 472, pp. 281-292.
23. Gladkikh, A., Karpovski, M., Palvski, A., and Kaganovskii, Y., Effect of Microstructure on Electromigration Kinetics in Cu Lines, J. Phys. D: Appl. Phys., 1998, vol. 31, pp. 1626-1629.
24. Chadwick, G.V. and Smith, D.A., Grain Boundary Structures and Properties, New York: Academic, 1976.
25. Kaur, I., Gust, W., and Kozma, L., Handbook of Grain and Interphase Boundary Diffusion Data, Stuttgart: Ziegler, 1989.
26. Schäfer, B., ODF Computer Program for High-Resolution Texture Analysis of Low-Symmetry Materials, Mater. Sci. Forum, 1998, vols. 273-275, pp. 113-118.
27. Huot, A., Fischer, A.H., von Glasow, A., and Schwarzer, R.A., Quantitative Texture Analysis of Cu Damascene Interconnects, in: Stress Induced Phenomena in Metallization, Kraft, O., Arzt, E., Volkert, C.A., Ho, P.S., and Okabayashi, H., Eds., AIP Conf. Proc., 1999, vol. 491, pp. 261-264.
28. Beck, A., Magnesium und Magnesiumlegierungen, Heidelberg: Springer, 2nd ed., 2001.
29. Wassermann, G. and Grewen, J., Texturen Metallischer Werkstoffe, 2nd edition, Berlin: Springer, 1962; translated under the title Tekstury metallicheskikh materialov, Moscow: Metallurgiya, 1969, pp. 7-9.
30. Wassermann, G. and Grewen, J., Texturen Metallischer Werkstoffe, 2nd edition, Berlin: Springer, 1962; translated under the title Tekstury metallicheskikh materialov, Moscow: Metallurgiya, 1969, pp. 7-9.
31. Wilson, D.V. and Chapman, J.A., Effects of Preferred Orientation on the Grain Size Dependence of Yield Strength in Metals, Philos. Mag., 1963, vol. 8, pp. 1543-1551.
32. Schwarzer, R.A., Local Crystal Textures: Experimental Techniques and Future Trends, Fresenius J. Anal. Chem., 1998, vol. 361, pp. 522-526.