Nanofabrication technology by gas cluster ion beams

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 6, 1996, Pages 3951-3954

  Matsuo, Jiro ^a   Toyoda, Noriaki ^a   Yamada, Isao ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001349102     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588621     Document Type: Article

References (24)

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