Influence of annealing temperature on optical properties of titanium oxide thin films

Qinghua Daxue Xuebao/Journal of Tsinghua University

Volumn 43, Issue 11, 2003, Pages 1441-1443

  Hou, Yaqi ^a   Zhuang, Daming ^a   Zhang, Gong ^a   Zhao, Ming ^a   Wu, Minsheng ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

Annealing; Mid frequency AC magnetron sputtering; Thin film optics; Titanium oxide thin film

Indexed keywords

ANNEALING; LIGHT REFLECTION; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; REFRACTIVE INDEX; SPECTROPHOTOMETERS; TITANIUM OXIDES;

EMPIRICAL FORMULA METHOD; ENVELOPE METHOD; EXTINCTION COEFFICIENT; MIDFREQUENCY AC MAGNETRON SPUTTERING; TITANIUM OXIDE THIN FILM;

THIN FILMS;

EID: 1642349340     PISSN: 10000054     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (13)

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