Study on the preparation and properties of titanium oxide thin film by mid-frequency alternative reactive magnetron sputtering technique

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4220, Issue , 2000, Pages 34-38

  Hou, Yaqi ^a   Zhuang, Daming ^a   Zhao, Daqing ^a   Zhang, Jihong ^a   Wang, Chengbiao ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CHARACTERIZATION; COMPOSITION; FILM PREPARATION; LIGHT ABSORPTION; MAGNETRON SPUTTERING; MICROSTRUCTURE; MORPHOLOGY; PHOTOCATALYSIS; REFRACTIVE INDEX; SURFACES; THICKNESS MEASUREMENT; TITANIUM OXIDES;

ANATASE; MID FREQUENCY ALTERNATIVE REACTIVE MAGNETRON SPUTTERING; PHOTOCATALYTIC DEGRADATION; TITANIUM OXIDE THIN FILM;

THIN FILMS;

EID: 0034462356     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)