A Study of an Ionized Magnetron Source by Pulsed Absorption Spectroscopy

Proceedings, Annual Technical Conference - Society of Vacuum Coaters

Volumn , Issue , 2003, Pages 452-456

  Konstantinidis, S ^a   Ricard, A ^b   Ganciu Petcu, M ^c   Dauchot, J P ^a   Wautelet, M ^a   Hecq, M ^a  

^a UNIVERSITY OF MONS   (Belgium)

^b UNIVERSITÉ PAUL SABATIER   (France)

^c NATIONAL INSTITUTE FOR LASER   (Romania)

Author keywords

Ionized magnetron; Pulsed absorption spectroscopy

Indexed keywords

ABSORPTION SPECTROSCOPY; IONIZATION; IONS; PLASMA DIAGNOSTICS; SIGNAL TO NOISE RATIO;

CATHODE LAMP;

MAGNETRONS;

EID: 0242384964     PISSN: 07375921     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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