Integrated microrelays: Concept and initial results

Journal of Microelectromechanical Systems

Volumn 11, Issue 2, 2002, Pages 147-153

  Lee, Han Sheng ^a   Leung, Chi H ^a   Shi, Jenny ^a   Chang, Shih Chia ^a   Lorincz, Samuel ^b   Nedelescu, Iulian ^b  

^a DELPHI CORPORATION   (United States)

^b Delphi Packard Electric Systems   (United States)

Author keywords

Arc suppression; Electrostatically actuation; Micromachining; Microrelaying

Indexed keywords

BIPOLAR TRANSISTORS; DURABILITY; ELECTRIC CONTACTS; ELECTRIC CURRENTS; ELECTRIC POTENTIAL; INTEGRATED CIRCUIT LAYOUT; MICROELECTROMECHANICAL DEVICES; RELAY PROTECTION; RESISTORS; SWITCHING CIRCUITS; SWITCHING FUNCTIONS; TRANSIENTS;

ARC SUPPRESSION CIRCUIT; CONTACT MATERIAL OXIDATION; ELECTROSTATICALLY ACTUATION; MICRORELAY CONTACTS; MICRORELAYING;

SEMICONDUCTOR RELAYS;

EID: 0036539414     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.993449     Document Type: Article

References (13)

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