New MEMS wafer probe card

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1997, Pages 395-399

  Zhang, Yanwei ^a   Zhang, Yongxia ^a   Worsham, Dan ^a   Morrow, Dan ^a   Marcus, R B ^a  

^a NEW JERSEY INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ELECTRIC RESISTANCE; FORCE MEASUREMENT; PROBES; THERMAL EFFECTS;

MICROCANTILEVERS; WAFER PROBE CARDS; WAFER STAGE TESTING;

MICROELECTROMECHANICAL DEVICES;

EID: 0030672517     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (15)