Contact properties of micromachined Ni probes

Electrical Contacts, Proceedings of the Annual Holm Conference on Electrical Contacts

Volumn , Issue , 2003, Pages 223-227

  Itoh, Toshihiro ^a   Kawamura, Shingo ^a   Kataoka, Kenichi ^a   Suga, Tadatomo ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

Fritting contact; Micro machined probe card

Indexed keywords

BUCKLING; ELECTRIC RESISTANCE; ELECTRODES; ELECTROPLATING; ETCHING; NICKEL; PROBES; SUBSTRATES; TENSILE STRESS;

BUCKLING CONTACT MODE; FRITTING CONTACT PROCESS; HIGH DENSITY PROBE CARDS; MICRO-CANTILEVER; MICROMACHINED NICKEL PROBES; NICKEL CURL UP CANTILEVER;

ELECTRIC CONTACTS;

EID: 0141904972     PISSN: 03614395     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

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