|
Volumn 244, Issue 1-4, 2005, Pages 338-342
|
Optical characterization of sol-gel deposited PZT thin films by spectroscopic ellipsometry and reflectometry in near-UV and visible regions
|
Author keywords
Ellipsometry; Optical constants; PZT films; Reflectometry
|
Indexed keywords
DEPOSITION;
DISPERSIONS;
ELLIPSOMETRY;
LEAD COMPOUNDS;
OPTICAL PROPERTIES;
REFRACTIVE INDEX;
SOL-GELS;
SPECTROSCOPIC ANALYSIS;
TRANSITION METALS;
ANGLE SPECTROSCOPIC ELLIPSOMETRY;
OPTICAL CONSTANTS;
PZT FILMS;
REFLECTOMETRY;
THIN FILMS;
|
EID: 15844425469
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/j.apsusc.2004.10.089 Document Type: Conference Paper |
Times cited : (14)
|
References (18)
|