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Volumn 5538, Issue , 2004, Pages 119-124
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Zirconium and niobium transmission data at wavelengths from 11-16 nm and 200-1200 nm
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Author keywords
EUVL; Extreme ultraviolet lithography; Niobium; Optical constants; Optical filters; Zirconium
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Indexed keywords
ELECTROFORMING;
LASER PRODUCED PLASMAS;
LIGHT TRANSMISSION;
NICKEL;
NIOBIUM;
OXIDATION;
PHOTOLITHOGRAPHY;
REFRACTIVE INDEX;
SUBSTRATES;
ULTRAVIOLET RADIATION;
X RAYS;
XENON;
ZIRCONIUM;
EXTREME ULTRAVIOLET LITHOGRAPHY (EUVL);
LUXEL CORPORATION (CO);
OPTICAL CONSTANTS;
SOFT X-RAYS;
OPTICAL FILTERS;
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EID: 15844412607
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.564259 Document Type: Conference Paper |
Times cited : (8)
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References (8)
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