Microfabrication of freestanding metal structures using graphite substrate

Sensors and Actuators, A: Physical

Volumn 103, Issue 1-2, 2003, Pages 182-186

  Makarova, Olga V ^a   Mancini, Derrick C ^b   Moldovan, Nicolaie ^b   Divan, Ralu ^b   Tang, Cha Mei ^a   Ryding, David G ^b   Lee, Richard H ^b  

^a CREATV MICROTECH INC   (United States)

^b ARGONNE NATIONAL LABORATORY   (United States)

Author keywords

Antiscatter grid; Graphite substrate; High aspect ratio; LIGA; MEMS; Microstructure release

Indexed keywords

ADHESION; ELECTROFORMING; FABRICATION; GRAPHITE; MEDICAL IMAGING; POLYMETHYL METHACRYLATES; SILICON; SUBSTRATES;

METAL STRUCTURES;

MICROSTRUCTURE;

EID: 0037438922     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(02)00333-3     Document Type: Conference Paper

References (11)

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