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Volumn 41, Issue 5, 2004, Pages 21-25
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Chip making's wet new world
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Author keywords
[No Author keywords available]
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Indexed keywords
ELECTRODES;
MASKS;
MICROPROCESSOR CHIPS;
MIRRORS;
OPTICAL INSTRUMENT LENSES;
OPTICAL SYSTEMS;
PHOTOLITHOGRAPHY;
PHOTORESISTS;
REFRACTIVE INDEX;
SILICON WAFERS;
IMMERSION LITHOGRAPHY;
NUMERICAL APERTURE;
SEMICONDUCTOR INDUSTRY;
ULTRAVIOLET LITHOGRAPHY;
INTEGRATED CIRCUIT MANUFACTURE;
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EID: 2442434426
PISSN: 00189235
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
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Times cited : (4)
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References (0)
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