EUV- microlithography - A challenge for optical metrology

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5533, Issue , 2004, Pages 20-26

  Seitz, Günther ^a   Schulte, Stefan ^a   Dinger, Udo ^a   Hocky, Oliver ^a   Fellner, Bernhard ^a   Rupp, Markus ^a  

^a CARL ZEISS SMT AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMAGNETIC WAVE DIFFRACTION; ERROR ANALYSIS; IMAGING SYSTEMS; INTERFEROMETERS; INTERFEROMETRY; OPTICAL VARIABLES MEASUREMENT; PROJECTION SYSTEMS; ULTRAVIOLET RADIATION;

DEPTH OF FOCUS (DOF); EXTREME ULTRAVIOLET LITHOGRAPHY (EUVL); NUMERICAL APERTURE (NA); OPTICAL METROLOGY;

PHOTOLITHOGRAPHY;

EID: 15744380381     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.556317     Document Type: Conference Paper

References (8)

1. Udo Dinger, Guenther Seitz, Stefan Schulte, Frank Eisert, Christian Muenster, Stefan Burkart, Siegfried Stacklies, Christian Bustaus, et al, Fabrication and Metrology of diffraction limited soft x-ray optics for the EUV microlithography, Proc SPIE 5193 (2003), in press
2. E. Louis, A. E. Yakshin, P. C. Görts, S. Oestreich, E. L. G. Maas, M.J.H. Kessels, D. Schmitz, F. Schmitz, G. Ulm, S. Müllender, M. Haidl and F. Bijkerk, Mo/Si multilayer coating technology for EUVL, coating uniformity and time stability, Proc. SPIE 4146, p. 13 (2000)
3. Gary E. Sommargren, Phase Shifting Diffraction Interferometry for Measuring Ultraviolet Optics, OSA TOPS on Extreme Ultraviolet Lithography, 1996 Vol 4.
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5. Bernd Dörband, Günther Seitz: Interferometric testing of optical surfaces at its current limit, International Journal for Light and Electron Optics, ISSN 0030-4026, 2001; Issue 112/9, S. 392
6. C. Gwyn, Extreme Ultraviolet Lithography, White Paper from EUV LLC (1998) P. O. Box 969, M-9911 Livermore, CA 94551-0069
7. rd International workshop on EUV Lithography, Matsue, Japan (2001), paper O 4-1
8. C. J. Evans, R. N. Kestner: Test optics error removal, Applied Optics p p. 1015 (1996)