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Volumn 112, Issue 9, 2001, Pages 392-398
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Interferometric testing of optical surfaces at its current limit
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Author keywords
Absolute figure error; Aspheric mirror testing; Calibration technique for interferometers; Interferometric repeatability; Interferometric testing
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Indexed keywords
ABERRATIONS;
GAS LASERS;
INTERFEROMETERS;
LIGHT SOURCES;
MIRRORS;
PHOTOLITHOGRAPHY;
SEMICONDUCTOR LASERS;
WAVEFRONTS;
DIRECT MEASURING INTERFEROMETRY;
FIZEAU INTERFEROMETER;
INTERFEROMETRIC TESTING;
INTERFEROMETRY;
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EID: 0035162428
PISSN: 00304026
EISSN: None
Source Type: Journal
DOI: 10.1078/0030-4026-00081 Document Type: Article |
Times cited : (41)
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References (12)
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