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Volumn 112, Issue 9, 2001, Pages 392-398

Interferometric testing of optical surfaces at its current limit

Author keywords

Absolute figure error; Aspheric mirror testing; Calibration technique for interferometers; Interferometric repeatability; Interferometric testing

Indexed keywords

ABERRATIONS; GAS LASERS; INTERFEROMETERS; LIGHT SOURCES; MIRRORS; PHOTOLITHOGRAPHY; SEMICONDUCTOR LASERS; WAVEFRONTS;

EID: 0035162428     PISSN: 00304026     EISSN: None     Source Type: Journal    
DOI: 10.1078/0030-4026-00081     Document Type: Article
Times cited : (41)

References (12)
  • 10


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.