Fabrication of micromachined fountain pen with in situ characterization possibility of nanoscale surface modification

Journal of Micromechanics and Microengineering

Volumn 15, Issue 3, 2005, Pages 528-534

  Deladi, S ^a   Berenschot, J W ^a   Tas, N R ^a   Krijnen, G J M ^a   De Boer, J H ^a   De Boer, M J ^a   Elwenspoek, M C ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHANNEL FLOW; CHARACTERIZATION; DEPOSITION; FABRICATION; FRICTION; MATERIALS SCIENCE; MICROMACHINING; NANOSTRUCTURED MATERIALS; NANOTECHNOLOGY; OPTIMIZATION; PHOTOLITHOGRAPHY; SURFACE TOPOGRAPHY; SURFACE TREATMENT; TRIBOLOGY; WEAR OF MATERIALS;

FLUIDIC CHANNELS; LUBRICATED SURFACES; MULTIFUNCTIONAL CANTILEVERS; SURFACE CHARACTERIZATION;

PROBES;

EID: 15544387748     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/3/013     Document Type: Article

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