A new assembly-transferred microwave switch with suspended CMOS-compatible coplanar waveguides

ASME International Mechanical Engineering Congress and Exposition, Proceedings

Volumn 2, Issue , 2001, Pages 2639-2643

  Chen, Jen Yi ^a   Li, I Yin ^a   Huang, Long Sun ^a   Kuo, Yao Hui ^a   Chu, Chia Hua ^a   Chang, Peizen ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; CMOS INTEGRATED CIRCUITS; ELECTRIC LINES; FUNCTIONS; INTEGRATION; MICROMACHINING; MICROWAVES; RESONANCE; SWITCHES; WAVEGUIDES;

COMPLEX STRUCTURES; MICROWAVE SWITCHES;

MICROELECTROMECHANICAL DEVICES;

EID: 1542726189     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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