Fabrication of novel polysilazane MEMS structures by microcasting

American Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS)

Volumn 3, Issue , 2001, Pages 837-844

  Liew, Li Anne ^a   Cross, Tsali ^a   Bright, Victor M ^a   Raj, Rishi ^a  

^a UCB 450   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CROSSLINKING; FLOW VISUALIZATION; GLASS; LASER ABLATION; MICROELECTROMECHANICAL DEVICES; OPTICAL DEVICES; PHOTOLITHOGRAPHY; PHOTORESISTS; SOL-GELS;

MICROCASTING; PHASE TRANSMISSION GRATING; PRECERAMICS;

POLYSILANES;

EID: 1542537560     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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