A magnetically actuated, electrostatically clamped high current MEMS switch

ASME International Mechanical Engineering Congress and Exposition, Proceedings

Volumn 2, Issue , 2001, Pages 2657-2661

  Choi, Yoonsu ^a   Kim, Kieun ^a   Allen, Mark G ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; CANTILEVER BEAMS; CAPACITANCE; CLAMPING DEVICES; COATINGS; ELECTRIC POTENTIAL; ELECTRODES; PARAMETER ESTIMATION; SWITCHES; SWITCHING;

CLAMPING ELECTRODES; RECONFIGURABLE ARRAYS;

MICROELECTROMECHANICAL DEVICES;

EID: 1542516363     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. Bohringer, K.-F.; Donald, B.R.; MacDonald, N.C., "Single-crystal silicon actuator arrays for micro manipulation tasks," Micro Electro Mechanical Systems, 1996, MEMS '96, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE, The Ninth Annual International Workshop on, 1996, pp. 7-12
2. Jo-Ey Wong; Lang, J.H.; Schmidt, M.A., "An electrostatically-actuated MEMS switch for power applications" Micro Electro Mechanical Systems, 2000. MEMS 2000. The Thirteenth Annual International Conference on, 2000, pp. 633-638
3. W.P. Taylor, O. Brand, M.G. Allen, "Fully Integrated Magnetically Actuated Micromachined Relays," IEEE/ASME J. Microelectromechanical Sys., vol. 7, no.2, pp. 181-191, June 1998
4. J. Judy and R. Muller, "Magnetically actuated, addressable microstructures", IEEE/ASME J. Microelectromechanical Sys., vol. 6, no. 3, pp. 249-56, 1997
5. J.A. Wright, Y. Tai, and S. Chang, "A Large-Force, Fully Integrated MEMS Magnetic Actuator," Proc. Transducers 1997, Chicago, vol.2 pp.793-796, 1997