SCOPUS 정보 검색 플랫폼

Volumn 453-454, Issue , 2004, Pages 458-461

Sub-micron period grating structures in Ta2O5 thin oxide films patterned using UV laser post-exposure chemically assisted selective etching

(5) Pissadakis, S a,b Ikiades, A b Tai, C Y a Sessions, N P a Wilkinson, J S a

a UNIVERSITY OF SOUTHAMPTON (United Kingdom)

b INSTITUTE OF ELECTRONIC STRUCTURE AND LASER (Greece)

Author keywords

Etching; Gratings; Laser ablation; Tantalum pentoxide; Waveguides

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRYSTALLIZATION; DIFFRACTION GRATINGS; ETCHING; EVAPORATION; INTERFEROMETRY; LASER ABLATION; OPTICAL WAVEGUIDES; PHOTOLITHOGRAPHY; REFRACTIVE INDEX; SPUTTERING; STOICHIOMETRY; THIN FILMS; TRANSPARENCY; ULTRAVIOLET RADIATION;

DIFFRACTION EFFICIENCY; TANTALUM PENTOXIDE;

TANTALUM COMPOUNDS;

EID: 1542425574 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2003.11.175 Document Type: Conference Paper

Times cited : (6)

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