University - National Laboratory Collaboration on MEMS Design Education

ASME International Mechanical Engineering Congress and Exposition, Proceedings

Volumn 2, Issue , 2001, Pages 717-721

  Kilani, Mohammad I ^a   Galambos, Paul C ^b   Haik, Yousef S ^a   Chen, Ching Jen ^a  

^a FAMU FSU COLLEGE OF ENGINEERING   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ELECTROSTATICS; MACHINE DESIGN; MAGNETIC FIELDS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PUMPS; SILICON WAFERS; STUDENTS;

MICROELECTROMECHANICAL SYSTEMS (MEMS); MICROPUMPS;

ENGINEERING EDUCATION;

EID: 1542411850     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

1. nd International Conference on Engineering Design and Automation.
2. Chen, C. J., Haik, Y. S., and Pai, V., "Magnetic Field Driven Micromachines and Related Methods", Patent Pending, 09/106,132
3. Yarbeny, V., and Jorgensen, C., 2001, "A 2D Visualization Tool for SUMMiT V Designs," Fourth International Conference on Modeling and Simulation of Microsystems.
4. Yarberry, V. R., 1998, "MEMS Design Rule Checking: a batch approach for remote operation," SPIE, 3328:32-39.
5. Jorgensen, C. R., and Yarberry, V. R., 2001, "A 3D Geometry Modeler for the SUMMiT-V MEMS Designer," Fourth International Conference on Modeling and Simulation of Microsystems.
6. Kilani, M. I., Galambos, P. C., Haik, Y. S., and Chen, C. J., 2001, "Electrostatically Actuated Surface Micromachined Offset Planetary Gear Pump Design," Accepted for publication in Microfluidies section of the ASME IMECE, New York City.
7. Bosch, Patent No. 5501893, 1996, "Method of Anisotropically Etching Silicon," Robert Bosch Gmblt.
8. Galambos, P., Eaton, W., et al., 1999, "Surface micromachined microfluidics: design, fabrication, testing and characterization," ASME Winter Annual Meeting, Nashville, TN.