Electrostically Actuated Surface Micromachined Offset Planetary Gear Pump Design

ASME International Mechanical Engineering Congress and Exposition, Proceedings

Volumn 2, Issue , 2001, Pages 3085-3090

  Kilani, Mohammad I ^a   Galambos, Paul C ^b   Haik, Yousef S ^c   Chen, Ching Jen ^a  

^a FAMU FSU COLLEGE OF ENGINEERING   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

^c FLORIDA A AND M UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATIC ACTUATORS; FLUIDIC DEVICES; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; POLYSILICON; POWER TRANSMISSION; RINGS (COMPONENTS); ROLLER BEARINGS; SURFACE STRUCTURE;

GEAR TRANSMISSIONS; MICROPUMPS; PLANETARY PUMPS;

GEAR PUMPS;

EID: 1542411501     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

1. Kovacs, G. A., 1998, Micromachined Transducers Sourcebook, McGraw-Hill.
2. Sniegowski, J. J., 1996a "Multi-level Polysilicon Surface micromachining Technology: Applications and Issues," ASME IMECE, Proc. of the ASME Aerospace Division, Atlanta, GA, AD-Vol. 52, pp. 751-759, November 17-22.
3. Smith, J., 1996 "Micromachined Sensor and Actuator Research at Sandia's Microelectronics Development Laboratory," Proc. Sensors Expo, Anaheim'96, pp. 119-123.
4. Sniegowski, J. J and Garcia E. J., 1996b "Surface Micromachined Gear Trains Driven by an On-Chip Electrostatic Microengine," IEEE Electron Device Letters, Vol. 17, No. 7, 366.
5. Sandia National Laboratories Inelligent Micromachine Initiative: http://www.mdl.sandia.gov/micromachine/
6. Rogers, S., Sniegowski, J. J., Miller, S., LaVigne, G. F., 1998 "Designing and Operating Electrostatically Driven Microengines," Proceedings of the 44th International Instrumentation Symposium, Reno, NV, May 3-7, pp. 56-65.
7. Yarberry V. and Jorgensen C., 2001, "A 2D Visualization Tool for SUMMiT V Designs," Fourth International Conference on Modeling and Simulation of Microsystems.