In-line Defect to Bitmap Signature Correlation: A Shortcut to Physical FA Results

Conference Proceedings from the International Symposium for Testing and Failure Analysis

Volumn , Issue , 2000, Pages 81-85

  Segal, Julie ^a   Sagatelian, Arman ^a   Hodgkins, Bob ^a   Ho, Tom ^a   Chu, Ben ^b   Singh, Tony ^b   Berman, Harvey ^b  

^a HPL Technologies Inc   (United States)

^b Dominion Semiconductor   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BINARY CODES; CAPACITORS; CLASSIFICATION (OF INFORMATION); CORRELATION METHODS; DEFECTS; DYNAMIC RANDOM ACCESS STORAGE; ELECTRONIC DOCUMENT IDENTIFICATION SYSTEMS; FAILURE ANALYSIS; MASKS; SEMICONDUCTOR DEVICE MANUFACTURE;

AUTOMATIC SIGNATURE CLASSIFICATION; BITMAPS;

SEMICONDUCTOR DEVICE TESTING;

EID: 1542360664     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. Julie Segal, Linda Milor, and Yeng-kuang Peng, "Reducing baseline defect density through modeling random defect-limited yield", MICRO Magazine, January 2000, pp. 61-71.
2. Julie Segal et al., "A Framework for Extracting Defect Density Information for Yield Modeling from In-Line Defect Inspection for Real-time Prediction of Random Defect Limited Yields," 1999 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (ISSM), pp. 403-406.
3. Julie Segal et al, "Critical Area Based Yield Prediction Using In-line Defect Classification Information", to be presented 2000 IEEE/SEMI Advanced Semiconductor Manufacturing Conference
4. A. Gordon, D. Sajoto, A. McCauley, "Inspection Optimization for Excursion and Baseline Defect Monitoring in a Manufacturing Environment", 1999 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (ISSM), p 371-374
5. R. Ott et al, "An Effective Method to Estimate Defect Limited Yield Impact on Memory Devices", Proceedings 1999 IEEE/SEMI Advanced Semiconductor Manufacturing Conference, pp. 87-91