Ultra-Low-Power Thermal Sensor with Silicon-On-Insulator (SOI) Structure for High-Temperature Applications

Proceedings of IEEE Sensors

Volumn 1, Issue 2, 2002, Pages 1419-1422

  Li, Bin ^a   Lai, P T ^b   Sin, J K O ^c   Liu, B Y ^b   Zheng, X R ^b   Wu, Z H ^b  

^a SOUTH CHINA UNIVERSITY OF TECHNOLOGY   (China)

^b UNIVERSITY OF HONG KONG   (Hong Kong)

^c HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

Author keywords

High temperature sensor; SOT; Thermal resistor

Indexed keywords

FABRICATION; HIGH TEMPERATURE APPLICATIONS; MATHEMATICAL MODELS; RESISTORS; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; THICK FILMS; THIN FILMS;

HIGH-TEMPERATURE SENSORS; THERMAL RESISTORS;

CHEMICAL SENSORS;

EID: 1542348528     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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