Optimization of silicon Spreading-Resistance Temperature sensor

Proceedings of the IEEE Hong Kong Electron Devices Meeting

Volumn , Issue , 2000, Pages 20-23

  Li, Bin ^a   Lai, P T ^a   Chan, C L ^a   Sin, J K O ^a  

^a UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CURRENTS; OPTIMIZATION; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DOPING; SUBSTRATES;

SILICON SPREADING-RESISTANCE TEMPERATURE (SRT) SENSORS;

SILICON SENSORS;

EID: 0034476055     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)