Monolithic integrated spreading-resistance silicon flow sensor

Sensors and Actuators, A: Physical

Volumn 58, Issue 1, 1997, Pages 85-88

  Lai, P T ^a   Liu, Baiyong ^b   Zheng, Xueren ^b   Li, Bin ^b   Zhang, Shouyuan ^b   Wu, Zhaohui ^b  

^a UNIVERSITY OF HONG KONG   (Hong Kong)

^b SOUTH CHINA UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Flow sensors; Monolithic integration; Silicon; Spreading resistance; Temperature sensing elements

Indexed keywords

HEAT TRANSFER; MONOLITHIC INTEGRATED CIRCUITS; SEMICONDUCTING SILICON; TEMPERATURE MEASUREMENT;

FLOW SENSORS; SPREADING RESISTANCE; TEMPERATURE SENSING ELEMENT;

SILICON SENSORS;

EID: 0030653835     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)80228-2     Document Type: Article

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