Novel MEMS Microshell Transducer Arrays for High-Resolution Underwater Acoustic Imaging Applications

Proceedings of IEEE Sensors

Volumn 1, Issue 1, 2002, Pages 541-546

  Mescher, Mark J ^a   Kirkos, Greg A ^b   Houston, Ken ^a   Cheng, Jinrong ^c   Bernstein, Jon J ^b   Cross, L Eric ^c  

^a CHARLES STARK DRAPER LABORATORY   (United States)

^b Corning IntelliSense Corp ^*  (United States)

^c PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAYS; FERROELECTRICITY; FREQUENCY RESPONSE; MICROMACHINING; PIEZOELECTRICITY; POLYIMIDES; PYROLYSIS; SENSITIVITY ANALYSIS; SILICON COMPOUNDS; SOL-GELS; TRANSDUCERS; ULTRASONIC IMAGING; UNDERWATER IMAGING;

ELECTRICAL ISOLATION; MICROSHELL STRUCTURE;

MICROELECTROMECHANICAL DEVICES;

EID: 1542301688     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)

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