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Volumn 1, Issue , 2000, Pages 37-40

In-plane polarization for high sensitivity ferroelectric MEMS ultrasound transducers

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; DIELECTRIC FILMS; ELECTRODES; EQUIVALENT CIRCUITS; FERROELECTRIC MATERIALS; MICROELECTROMECHANICAL DEVICES; POLARIZATION; SEMICONDUCTING LEAD COMPOUNDS; SEMICONDUCTING SILICON; SILICA; STRESSES; ZIRCONIA;

EID: 0034473680     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (1)

References (9)
  • 3
    • 0005923539 scopus 로고
    • Application of polyvinylidene fluoride to monolithic silicon PVF2 transducer arrays
    • Ph.D. Dissertation, Stanford University, (May)
    • (1979)
    • Swartz, R.G.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.