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Volumn 1, Issue , 2000, Pages 37-40
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In-plane polarization for high sensitivity ferroelectric MEMS ultrasound transducers
a a a a a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
CMOS INTEGRATED CIRCUITS;
DIELECTRIC FILMS;
ELECTRODES;
EQUIVALENT CIRCUITS;
FERROELECTRIC MATERIALS;
MICROELECTROMECHANICAL DEVICES;
POLARIZATION;
SEMICONDUCTING LEAD COMPOUNDS;
SEMICONDUCTING SILICON;
SILICA;
STRESSES;
ZIRCONIA;
FERROELECTRIC FILM;
FERROELECTRIC ULTRASOUND TRANSDUCER;
IN-PLANE POLARIZATION;
ULTRASONIC TRANSDUCERS;
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EID: 0034473680
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (1)
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References (9)
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