Comparative Study of Sample Preparation Techniques for Backside Analysis

Conference Proceedings from the International Symposium for Testing and Failure Analysis

Volumn , Issue , 2000, Pages 161-171

  Perdu, Philippe ^a   Desplats, Romain ^a   Beaudoln, Felix ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC MATERIALS; GRINDING WHEELS; LASER ABLATION; MILLING (MACHINING); OPTICAL MICROSCOPY; PLASTICS; POLISHING; PROCESS CONTROL; SURFACE ROUGHNESS;

BACKSIDE ANALYSIS; CHEMICAL DECAPSULATION; EMISSION MICROSCOPY; SAMPLE PREPARATION TECHNIQUES;

FLIP CHIP DEVICES;

EID: 1542270816     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)

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